Silicon Nanomembrane Phototransistor Flipped with Multifunctional Sensors Toward Smart Digital Dust

Gongjin Li,Zhe Ma,Chunyu You,Gaoshan Huang,Enming Song,Ruobing Pan,Hong Zhu,Jiaqi Xin,Borui Xu,Taeyoon Lee,Zhenghua An,Zengfeng Di,Yongfeng Mei

DOI: https://doi.org/10.1126/sciadv.aaz6511

IF: 13.6

2020-01-01

Science Advances

Abstract:The sensing module that converts physical or chemical stimuli into electrical signals is the core of future smart electronics in the post-Moore era. Challenges lie in the realization and integration of different detecting functions on a single chip. We propose a new design of on-chip construction for low-power consumption sensor, which is based on the optoelectronic detection mechanism with external stimuli and compatible with CMOS technology. A combination of flipped silicon nanomembrane phototransistors and stimuli-responsive materials presents low-power consumption (CMOS level) and demonstrates great functional expansibility of sensing targets, e.g., hydrogen concentration and relative humidity. With a device-first, wafer-compatible process introduced for large-scale silicon flexible electronics, our work shows great potential in the development of flexible and integrated smart sensing systems for the realization of Internet of Things applications.