Metamaterial gas sensing platform based on surface-enhanced infrared absorption

Hong Zhou,Dongxiao Li,Xindan Hui,Donglin Hu,Xin Chen,Xianming He,Xiaojing Mu
DOI: https://doi.org/10.1109/mems46641.2020.9056404
2020-01-01
Abstract:This paper presents a miniaturized gas sensing platform for rapid and ultrasensitive optical detection of methane gas by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial absorber with a smart, porous metal organic framework (MOF). The implementation of methane gas detection relies on the integration between metamaterials and MOF, where MOF functions as a gas trap to capture more gas into the metamaterial absorber. We have experimentally demonstrated an approximately 1,000-fold sensitivity enhancement by using this method. Furthermore, the investigation of the geometry-dependent characteristics provides a way to further expand the scope of application, such as CO2, CO and SO2, etc.
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