NBR Surface Modification by Gaseous Plasma Source with Electron Injection

M. Shandrikov,I. D. Artamonov,E. M. Oks,G. Yu Yushkov,Bin Zhang,Changning Bai,Kaixiong Gao
DOI: https://doi.org/10.1016/j.surfcoat.2020.125556
IF: 4.865
2020-01-01
Surface and Coatings Technology
Abstract:A gaseous plasma source for materials surface modification has been developed and investigated in detail. The operating pressure range was 6.7 x 10(-2) : 2.5 x 10(-1) Pa. At discharge current of 10 A and discharge voltage of 100 V the maximum plasma density was up to 3.0(10) cm(-3) in the volume up to 0.1 m(3) in DC mode. The possibility of independent control of the current of injected electrons and their energy, makes it possible to choose the optimal parameters to ensure high energy efficiency of plasma generation (up to 150 eV/ion) according to process requirements and material properties. Using Hughes-Rojansky electrostatic analyzer and moveable Langmuir probe, an electron and ion energy spectra and plasma distribution were measured in the region of substrate location. The source was used for NBR surface modification in the ambient of noble gases, nitrogen, oxygen and acetylene. It has been shown that plasma treatment leads to a decrease in the coefficient of friction of NBR by 2-3 times.
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