High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments

Hoang-Phuong Phan,Toan Dinh,Tuan-Khoa Nguyen,Afzaal Qamar,Thanh Nguyen,Van Thanh Dau,Jisheng Han,Dzung Viet Dao,Nam-Trung Nguyen
DOI: https://doi.org/10.1016/j.jhazmat.2020.122486
IF: 13.6
2020-01-01
Journal of Hazardous Materials
Abstract:With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 degrees C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.
What problem does this paper attempt to address?