Abstract:Nanopores in 2D materials are of significant interest in advanced membrane technologies aimed at the sensing and separation of ions and molecules. These applications necessitate 2D nanopores that are precise in size and shape, and abundant in number. However, conventional fabrication techniques often struggle to achieve both high precision and throughput. In this study, we introduce a decoupled seeding and growth approach designed to overcome this limitation. The method allows the controlled fabrication of ensembles of nanopores with narrow size distribution and is demonstrated for free-standing monolayer hexagonal boron nitride. Using light ion showering, we first create vacancy defect seeds. These seeds are then expanded into triangular nanopores through element-specific preferential atom removal under broad-beam electron irradiation in a transmission electron microscope. Nanopore density and size are controlled by the ion and electron irradiation doses, respectively. During the electron irradiation step, high-resolution imaging allows real-time tracking of the nanopore formation process, enabling the highest level of control. An additional workflow is introduced using thermal annealing in air for the nanopore growth step, delivering the most flexible platform for nanopore fabrication over larger areas with the significant benefit of concurrently removing surface hydrocarbon contamination to mitigate pore clogging and distortion. This study provides researchers with a novel approach to create ensembles of meticulously designed nanopores with well-controlled size and geometry, facilitating the development of next-generation membrane devices that will demand high precision and high throughput nanopore fabrication pipelines.

Size-limited high-density nanopore formation in two-dimensional moiré materials

Atomic Engineering of Triangular Nanopores in Monolayer hBN: A Decoupled Seeding and Growth Approach

A moiré theory for probing grain boundary structure in graphene

Evolution of Moiré Profiles from van der Waals Superstructures of Boron Nitride Nanosheets

Ultra-high-resolution imaging of moiré lattices and superstructures using scanning microwave impedance microscopy under ambient conditions

Perforating freestanding molybdenum disulfide monolayers with highly charged ions

Defect Sizing, Separation, and Substrate Effects in Ion-Irradiated Monolayer Two-Dimensional Materials

Fabrication of Atomically Precise Nanopores in Hexagonal Boron Nitride

Nanoscale lattice dynamics in hexagonal boron nitride moiré superlattices

Fabrication of Nanopores in a Graphene Sheet with Heavy Ions: A Molecular Dynamics Study

Defect Sizing, Distance and Substrate Effects in Ion-Irradiated Monolayer 2D Materials

Emergence of moiré superlattice potential in graphene by twisted-hBN layers

Proton transport through nanoscale corrugations in two-dimensional crystals

Facile Fabrication of Subnanopores in Graphene under Ion Irradiation: Molecular Dynamics Simulations

Imaging Dual-Moiré Lattices in Twisted Bilayer Graphene Aligned on Hexagonal Boron Nitride Using Microwave Impedance Microscopy

Moiré Patterns as a Probe of Interplanar Interactions for Graphene on h-BN

Imaging Self-aligned Moiré Crystals and Quasicrystals in Magic-angle Bilayer Graphene on hBN Heterostructures

Large Photothermal Effect in Sub-40 nm h-BN Nanostructures Patterned Via High-Resolution Ion Beam

Moir{é} patterns as a probe of interplanar interactions: graphene on h-BN

Characteristic nanoscale deformations on large area coherent graphite moiré

Engineering high quality graphene superlattices via ion milled ultra-thin etching masks