Abstract:This article presents a novel 30.5-dBm output power 1 transmitter and 2 receivers (1T2R) heterogeneously integrated (HI) phased-array frequency-modulated continuous-wave (FMCW) radar transceiver using local oscillator (LO) phase shifting (PS). Two $X$ -band GaAs-based 6-bit PSs are designed and placed at the LO path. Two $W$ -band GaN-based power amplifiers (PAs) are proposed, amplifying the FMCW signals with 30.5 dBm at output. The antenna in package (AiP) is designed and fabricated in a high-resistivity silicon wafer by combining through silicon ring-trench and artificial magnetic conductor (AMC), where the 1 $\times$ 4 antenna array has a high radiation efficiency (70%), a broadband (12%), and a high gain (11.8 dBi) in the $W$ -band. Two $W$ -band SiGe-based transceiver systems on a chip, GaN-based PAs, AMC-based AiPs, and two $X$ -band GaAs PSs are HI with a transceiver size of 31 $\times$ 17 mm $^{{2}}$ by using our in-house silicon-based MEMS photosensitive composite film given the advantages of high-density integration and fabrication accuracy. The HI radar application is measured with an effective isotropic radiated power of 41 dBm with a measured 2 cm range resolution. The beam scanning performance is also measured and presented using three corner reflectors located at different azimuths. Simulated and measured beamforming results show good agreement. The HI radar sensor has a size of 70 $\times$ 70 mm $^{{2}}$ with a weight of only 200 g.

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