Abstract:Precise control of ferroelectric and multiferroic domain states at the nanoscale is of considerable interest due to the potential to boost the development of next-generation low-energy-consumption nanoelectronic components. Progress in this field is closely related to advances in spatially resolved characterization methods. In this regard, scanning electron microscopy (SEM) as a powerful and highly versatile imaging technique with diversified inner detectors possesses huge potential for scale-bridging microscopy studies (spanning from micrometers to nanometers). Here, both the phase variants and the ordered ferroelectric nanodomains of the tetragonal-like (T) phase in the rhombohedral-like (R) and T mixed-phase BiFeO3 nanoscale film are acquired simultaneously using the surface-sensitive scanning low-energy electron microscopy (SLEEM) for the first time. In particular, backscattered electron (BSE) signals, which bring abundant polarization information, can be utilized to discern polarized discrepancy in mixed-phase BiFeO3 nanoscale films. Furthermore, it is demonstrated that the polarization contrast of nanodomains increases with increasing ratio of the low-loss BSEs in the collected signal. Electron trajectories simulation enables us to optimize and separate morphological and polarization contrast in angle-selective BSEs imaging in the presence of a deceleration field. SLEEM combines with other nanocharacterization and fabrication techniques, such as three-dimensional (3D) atom probe tomography, opening up new opportunities for tackling the complex nanoscale physics and defect chemistry of ferroelectric nanomaterials.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsanm.1c00204?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsanm.1c00204</a>.Reciprocal space mappings (RSMs) of the (a) (002), (b) (113), and (c) (103) reflections in the mixed-phase BiFeO3 nanoscale film (Figure S1); Monte Carlo simulations of interaction volumes in BiFeO3 nanoscale films (Figure S2); and the schematic arrangement of the CBS segmented detector without the sample bias (Figure S3) (<a class="ext-link" href="/doi/suppl/10.1021/acsanm.1c00204/suppl_file/an1c00204_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

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