Improvement of Stage Mura in High PPI TPC Color Filter Products

Jiang Qian,Ta La,Xue Feng-ming,Zhang Xu,Meng Ling-jian,Wang Kun,Zhou Peng,Wang Xu
DOI: https://doi.org/10.3788/yjyxs20193406.0537
2019-01-01
Chinese Journal of Liquid Crystals and Displays
Abstract:As for the exposure stage Mura in small size and high PPI(Pixel Per Inch) TPC(Tablet Personal Computer) color filter product, it was found that the black matrix(BM) critical dimension(CD) and tape angle in Mura area are different from good area through the characteristic analysis. The reasons were supposed to be the difference of the temperature and gap between Mura area and good area during exposure process and were verified through experiments. After adjusting the exposure temperature and gap, the BM CD and Tape Angle were observed by scanning electron microscope(SEM) and it was found the difference between Mura area and good area were diminished. The stage Mura defect ratio decreases from 7.2% to 1.4% by the adjustment. Furthermore, to diminish the transmittance gap between Mura area and good area in general, the BM thickness is adjusted and the stage Mura defect ratio decreases to 0.6% finally.
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