Abstract:The reliability of analysis is becoming increasingly important as point-of-care diagnostics are transitioning from single analyte detection towards multiplexed multianalyte detection. Multianalyte detection benefits greatly from complementary metal-oxide semiconductor (CMOS) integrated sensing solutions, offering miniaturized multiplexed sensing arrays with integrated readout electronics and extremely large sensor counts. The development of CMOS back end of line integration compatible graphene field-effect transistor (GFET) based biosensing has been rapid during the last few years, both in terms of the fabrication scale-up and functionalization towards biorecognition from real sample matrices. The next steps in industrialization relate to improving reliability and require increased statistics. Regarding functionalization towards truly quantitative sensors and on-chip bioassays with improved statistics require sensor arrays with reduced variability in functionalization. Such multiplexed bioassays, whether based on graphene or on other sensitive nanomaterials, are among the most promising technologies for label-free electrical biosensing. As an important step towards that, we report wafer-scale fabrication of CMOS integrated GFET arrays with high yield and uniformity, designed especially for biosensing applications. We demonstrate the operation of the sensing platform array with 512 GFETs in simultaneous detection for sodium chloride concentration series. This platform offers a truly statistical approach on GFET based biosensing and further to quantitative and multi-analyte sensing. The reported techniques can also be applied to other fields relying on functionalized GFETs, such as gas or chemical sensing or infrared imaging.

Ultrafast large-scale chemical sensing with CMOS ISFETs: a level-crossing time-domain approach.

Multiplexed Chemical Sensing CMOS Imager.

A 32×32 ISFET Array with In-Pixel Digitisation and Column-Wise TDC for Ultra-Fast Chemical Sensing

A TDC based ISFET readout for large-scale chemical sensing systems

A 3600 × 3600 Large-Scale ISFET Sensor Array for High-Throughput Ph Sensing

A Dual-Mode Large-Arrayed Cmos Isfet Sensor For Accurate And High-Throughput Ph Sensing In Biomedical Diagnosis

Exploiting CMOS Technology to Enhance the Performance of ISFET Sensors

Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor for Biosensor Applications

A CMOS Pixelated Nanocapacitor Biosensor Platform for High-Frequency Impedance Spectroscopy and Imaging

Sensing Characteristic Enhancement of CMOS-Based ISFETs With Three-Dimensional Extended- Gate Architecture

Molecular sensing using monolayer floating gate, fully depleted SOI MOSFET acting as an exponential transducer

ISFET‐based Sensors for (bio)chemical Applications: A Review

A 64×64 1200fps dual-mode CMOS ion-image sensor for accurate DNA sequencing

A High-Sensitivity Potentiometric 65-nm CMOS ISFET Sensor for Rapid E. coli Screening.

Molecular electronics sensors on a scalable semiconductor chip: A platform for single-molecule measurement of binding kinetics and enzyme activity

Wafer-scale graphene field-effect transistor biosensor arrays with monolithic CMOS readout

Ion-sensitive field effect transistor biosensors for biomarker detection: current progress and challenges.

Amorphous Silicon Thin Film Transistor Biosensing System

An ISFET Design Methodology Incorporating CMOS Passivation.

On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications

Recent Advances in Ion‐sensitive Field‐effect Transistors for Biosensing Applications