The Dielectric Properties of Some Ceramic Substrate Materials at Terahertz Frequencies

Mingsheng Ma,Yi Wang,Miguel Navarro-Cia,Feng Liu,Faqiang Zhang,Zhifu Li,Yongxiang Li,Stephen M. Hanham,Zhangcheng Hao

DOI: https://doi.org/10.1016/j.jeurceramsoc.2019.06.012

IF: 5.7

2019-01-01

Journal of the European Ceramic Society

Abstract:The terahertz (THz) dielectric constant (epsilon(r)') and dielectric loss tangent (tan delta) of the commercial LTCC materials (Ferro A6M and DuPont 951), Al2O3 (ceramic and single crystal), AlN and beta-Si3N4 ceramics were measured using a vector network analyzer (VNA) over the frequency range of 140-220 GHz and a time-domain spectrometer (TDS) from 0.2 to 1.0 THz. The results from the two instruments are compared with the literature and show good agreement and consistency. For Ferro A6M, epsilon(r)' = 6.06, tan delta = 0.012 at 1.0 THz. For DuPont 951, epsilon(r)' = 7.67, tan delta = 0.097 at 1.0 THz. For Al2O3 ceramic and single crystal, the measured THz dielectric properties are consistent with the reported works. The dielectric constant of AlN (epsilon(r)' = 8.85) and beta-Si3N4 (epsilon(r)' = 8.41) ceramics in the THz region is a little lower than those reported for the MHz to GHz region. These results provide valuable and much needed reference information for device designers and material scientists.