Feasible atomic-resolution electron tomography for general crystal surfaces by quantitative reconstruction from a high-resolution image.

R H Shen,W Q Ming,J H Chen,Y T He,S B Mi,C S Ma
DOI: https://doi.org/10.1016/j.ultramic.2019.06.002
IF: 2.994
2019-01-01
Ultramicroscopy
Abstract:•A 3D tomographic method onto a single atomic-resolution TEM image is proposed.•The method includes a globe-matching algorithm and a self-validated scheme.•3D atomic-resolution and confidence level of the tomographic method can be defined.•3D-resolution of 0.384 nm and confidence level of 95% were achieved in a Si case.•The method is feasible to reveal crystal surface structures covered with amorphous.
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