Abstract:In addition to the separate control of the ion energy and ion flux, the so-called electrical asymmetry effect (EAE) also plays an important role in improving the plasma radial uniformity. In this work, a two-dimensional fluid model combined with a full set of Maxwell equations is used to investigate the plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple consecutive harmonics. The effects of the phase angle theta(n) on the dc self-bias (V-dc) and on the plasma radial uniformity for different numbers of consecutive harmonics k are discussed. The simulation results indicate that the phase angles of different harmonics theta(n) have different influences on the dc self-bias V-dc. For instance, V-dc varies almost linearly with theta(1) with a period pi in dual frequency discharge, and the period is 2 pi. for other discharge conditions. Besides, the modulation of V-dc becomes less obvious by changing the phase angle of the highest harmonic theta(k), especially for k > 3. In addition, both the axial component of the power density P-z and the radial component of the power density P-r vary with theta(n), thus the plasma radial uniformity can be adjusted. When the total power density at the radial edge becomes comparable to that in the discharge center, the plasma distribution becomes uniform. For instance, when k = 2, the plasma radial uniformity is the best at the phase angle theta(1) = pi/2 and theta(2) = pi. However, for k = 3, the best radial uniformity is observed at theta(1) = 3 pi/2, and the nonuniformity degree alpha is only 0.41% under this condition. It is worth noting that at k = 8, the maximum of alpha is seven times higher than the minimum by changing the phase angles theta(1) and theta(2), which means that the plasma radial uniformity can be adjusted effectively. However, the modulation induced by theta(k)(k > 3) becomes less obvious, especially for k = 8. Indeed, the electron density shows an edge-high profile, and the radial uniformity is always bad for all theta(8) investigated. The results obtained in this work can help us to gain an insight into the optimization the plasma process by utilizing the EAE.

The Effect of Phase Shift on the Plasma Driven by an AC Voltage and a Pulsed DC Voltage

AC/DC Power Modulation for Corona Plasma Generation

Phase Modulation in Pulsed Dual-Frequency Capacitively Coupled Plasmas

Computational Study on the Discharge Dynamics of Atmospheric Pressure He Plasma Driven by High Frequency AC Voltage

Effect of gas components on the post-discharge temporal behavior of OH and O of a non-equilibrium atmospheric pressure plasma driven by nanosecond voltage pulses

Study On A Room-Temperature Air Plasma For Biomedical Application

Experimental and Numerical Investigations of the Phase-Shift Effect in Capacitively Coupled Discharges

Phase-shift Effect in Capacitively Coupled Plasmas with Two Radio Frequency or Very High Frequency Sources

Regulation of Pulse DC Power on the Long Lived Reactive Species Concentration of AC Excited Plasma in Liquid Phase

Comparison on the Absolute Concentrations of Hydroxyl and Atomic Oxygen Generated by Five Different Nonequilibrium Atmospheric-Pressure Plasma Jets

Electrode Cooling and Microwave Absorption by Phase Change Fluid Discharge Plasma

Preliminary Exploration on the Low-Pressure Ar-O2 Plasma Generated by Low-Frequency Alternating Current (AC) Power Supply

Pulsed Dc- and Sine-Wave-excited Cold Atmospheric Plasma Plumes: A Comparative Analysis

Optimization Of Ultraviolet Emission And Chemical Species Generation From A Pulsed Dielectric Barrier Discharge At Atmospheric Pressure

The Production Efficiency of Reactive Oxygen and Nitrogen Species (RONS) of AC and Pulse-DC Plasma Jet

Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge

Energy Exchange Modulation for Selective Control of Gas Temperature and Electron Number Density in Cold Atmospheric Plasmas

Atmospheric Pressure Pulsed Modulated Arc Discharge Plasma

Effect of Duty Cycle on Pulsed Discharge Atmospheric Pressure Plasma: Discharge Volume and Remnant Electron Density

Effects of Various Parameters on the Length OFA Cold Plasma Plume

Delivering fluxes of reactive species of cold atmospheric-pressure plasmas through the electrode sheath region