Phase Unwrapping in Optical Metrology Via Denoised and Convolutional Segmentation Networks

Junchao Zhang,Xiaobo Tian,Jianbo Shao,Haibo Luo,Rongguang Liang
DOI: https://doi.org/10.1364/oe.27.014903
IF: 3.8
2019-01-01
Optics Express
Abstract:The interferometry technique is commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 2π ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentation network to identify classes. Moreover, a noise-to-noise denoised network is integrated to preprocess noisy wrapped phase. We have demonstrated the proposed method with simulated data and in a real interferometric system.
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