Micro quartz crystal tuning fork based photothermal spectroscopy for trace gas detection

Linguang Xu,Sheng Zhou,Jingsong Li
DOI: https://doi.org/10.1016/j.sna.2024.115587
IF: 4.291
2024-06-12
Sensors and Actuators A Physical
Abstract:This paper describes a micro-quartz crystal tuning fork (M-QCTF) hermetically sealed in a vacuum environment for the development of low-cost, high-sensitivity photothermal detectors. Compared with conventional QCTF-based photothermal detectors exposed to air, the M-QCTF detector with the approximate stable characteristic resonance frequency (∼32763 Hz) has a small size and high quality factor of 19840. Utilizing the M-QCTF detector and direct absorption spectroscopy (DAS) technology, a gas detection system has been successfully implemented. NO 2 was selected as the target gas for evaluating the performance of the M-QCTF based gas sensor. The results indicate a strong linear relationship between the normalized absorbance amplitude of the M-QCTF and the gas concentration, achieving an optimal measurement precision of 117 ppb with an integration time of 230 s. Furthermore, the vacuum packaging structure of the M-QCTF provides advantages such as easy system integration, low cost, and robust anti-interference capability.
engineering, electrical & electronic,instruments & instrumentation
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