Highly Sensitive Ultraviolet Sensor Based on ZnO Nanorod Film Deposited on ST-cut Quartz Surface Acoustic Wave Devices

W. Li,Y. J. Guo,Q. B. Tang,X. T. Zu,J. Y. Ma,L. Wang,K. Tao,H. Torun,Y. Q. Fu
DOI: https://doi.org/10.1016/j.surfcoat.2019.02.041
2019-01-01
Abstract:A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydro thermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 mu W cm(-2), the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by similar to 200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is similar to 3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.
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