A High-Efficient Piezoelectric Harvester via Optimizing Length of Piezoelectric Layer on a Flexible Substrate

Xiaoxue Dong,Zhiran Yi,Bin Yang,Xiang Chen,Xiaolin Wang,Jingquan Liu
DOI: https://doi.org/10.1109/NEMS.2018.8556868
2018-01-01
Abstract:Up to now, the effect of the piezoelectric layer length on the output performance of MEMS harvesters with proof mass has not reported from the theory and experiments. In this work., an optimal piezoelectric layer length of piezoelectric layer from 1mm to 10 mm on a flexible metal substrate (15 mm) is calculated and analyzed, which obviously improves the output performance of piezoelectric energy harvester (PEH) with a proof mass. Moreover., the flexible substrate can be used to enhance stability of PEH immensely.
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