A liquid MEMS inclinometer sensor with improved sensitivity

Han-yang Xu,Yu-long Zhao,Kai Zhang,Zi-xi Wang,Kyle Jiang

DOI: https://doi.org/10.1016/j.sna.2018.11.046

2019-01-01

Abstract:•Proposing a liquid MEMS inclinometer sensor basic on the wettability of metal liquid droplet.•The sliding angle of micro-mercury droplet on annular groove is analyzed.•The sensor we proposed has an accurate resolution (3.625°) and a wide measuring range (±10.12° to ±45°). The use of liquid droplets as the sensing element allows the sensor to improve its impact resistance.