Synchronous detection of X-Y-Θ displacements by image processing

吴鹰飞,周兆英
DOI: https://doi.org/10.3321/j.issn:1002-1582.2002.04.031
2002-01-01
Abstract:A detection system is developed to measure the three freedom degrees displaceme nts of planar stage. The core parts of the system are CCD camera, microscope, im age collection and image processing. The software of image processing is written using VC. The relationship between time and displacements of X, Y and Θ is calculated and plotted. Movement track of the stage is also plotted using th is software. Displacements detection of the system is not influenced by large ro tation of planar stage. Displacement resolution of sub pixel is achieved. The system can obtain both high resolution and large detection range by selecting t he appropriate magnification of microscope.
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