Abstract:In precision motion control, well-designed feedforward control can effectively compensate the reference-induced tracking error. To achieve excellent tracking performance such as nanometer accuracy regardless of reference variations, an integrated model-data-based zero-phase error tracking feedforward control (ZPETFC) strategy is synthesized for precision motion systems with complex and nonminimum phase (NMP) dynamics. The feedforward controller comprises a conventional ZPETFC controller and a gain compensation filter structured with symmetric finite impulse response (FIR) filter. Especially, the conventional ZPETFC is predesigned based on the plant model, and consequently, the feedforward controller is parameterized by the gain compensation filter coefficients, which results in excellent capacity for approximating the inverse behavior of the complex and NMP dynamics. In order to compensate the modeling error in the conventional ZPETFC design and improve the tracking performance, a data-based instrumental-variable method with impulse response experiment is developed to obtain the optimal parameter vector under the existence of noise and disturbances. Furthermore, the ridge estimate method using singular value decomposition is employed to guarantee a fast convergent iteration in the case of ill-conditioned Hessian matrix. The proposed ZPETFC strategy enables a convex optimization procedure with the inherent stability in the iterative tuning process, and is finally implemented on a developed ultraprecision wafer stage. Comparative experimental results demonstrate that the strategy is insensitive to reference variations in comparison with iterative learning control, and outperforms preexisting model-based ZPETFC and data-based FIR feedforward control.

The Generation Mechanism of Tracking Error During Acceleration or Deceleration Phase in Ultraprecision Motion Systems

Predictive Control Method of Autonomous Vehicle Based on Tracking-error Model

Quantitative Analysis on Tracking Error Under Different Control Architectures and Feedforward Methods

Quantitative Tracking Error Analysis and Feedforward Compensation under Different Model-Based Feedforward Controllers in Different Control Architectures

Synchronous Tracking Control for Hydraulic Stewart Platform Based on Combination Tracking Errors in Operation Workspace

Auto-tuning of Model-Based Feedforward Controller by Feedback Control Signal in Ultraprecision Motion Systems

Design of motion controller for precision stage based on tracking error predict

Robust Trajectory Tracking Control of a Planar Parallel Mechanism

Fast and Accurate Motion Tracking of a Linear Motor System under Kinematic and Dynamic Constraints: an Integrated Planning and Control Approach

H ∞ Reference Tracking Control Design for a Class of Nonlinear Systems with Time-Varying Delays

Trajectory Tracking of Robot Based on Adaptive Theory

A Generalized Trajectory Tracking Controller for Robot Manipulators with Bounded Inputs

An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy with Application to an Ultraprecision Wafer Stage.

Asymptotic Tracking Controller Design for Nonlinear Systems with Guaranteed Performance.

Trajectory tracking control for robot manipulators with bnounded torque inputs via fuzzy PD

Realization of Exact Tracking Control for Nonlinear Systems Via a Nonrecursive Dynamic Design.

Data-Driven Tracking for Nonlinear Systems: A Multi-Step Error Feedback Model Free Adaptive Control Method

Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages with High-bandwidth Control

Contour Error Dynamic Analysis and Predictive Control for Multi-Axis Motion System

A Model Predictive Control with Preview-Follower Theory Algorithm for Trajectory Tracking Control in Autonomous Vehicles

D-Tracking: Digital Twin Enabled Trajectory Tracking System of Autonomous Vehicles