The Transition to Paschen’s Law for Microscale Gas Breakdown at Subatmospheric Pressure

Amanda M. Loveless,Guodong Meng,Qi Ying,Feihong Wu,Kejing Wang,Yonghong Cheng,Allen L. Garner
DOI: https://doi.org/10.1038/s41598-019-42111-2
IF: 4.6
2019-01-01
Scientific Reports
Abstract:The decrease in electronic device size necessitates greater understanding of gas breakdown and electron emission at microscale to optimize performance. While traditional breakdown theory using Paschen’s law (PL), driven by Townsend avalanche, fails for gap distance d ≲ 15 μm , recent studies have derived analytic equations for breakdown voltage when field emission and Townsend avalanche drive breakdown. This study derives a new analytic equation that predicts breakdown voltage V B within 4
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