Utilizing Large Hall Offset Voltage for Conversion Free 4H-Sic Strain Sensor

Tuan-Khoa Nguyen,Hoang-Phuong Phan,Jisheng Han,Toan Dinh,Abu Riduan Md Foisal,Yong Zhu,Nam-Trung Nguyen,Dzung Viet Dao
DOI: https://doi.org/10.1109/memsys.2018.8346697
2018-01-01
Abstract:This work presents a conversion free p-type 4H silicon carbide (4H-SiC) four-terminal strain sensor utilizing a large Hall offset voltage in a symmetric four-terminal configuration. Upon the application of mechanical strain, a high sensitivity of 209 mV/A/ppm was obtained. The strain sensor also exhibited good repeatability and linearity with a significantly large offset voltage in the induced strain ranging from 0 to 334ppm. Coupled these performances with the excellent mechanical strength, electrical conductivity, thermal stability, and chemical inertness of the SiC material, the proposed 4H-SiC strain sensor is promising for stress/strain monitoring for harsh operating environments with high signal-to-noise ratio.
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