QUANTITATIVE ANALYSIS OF TEXTURE CHANGE IN THIN SILVER FILMS

辛晓天,张建民,马飞

DOI: https://doi.org/10.3969/j.issn.1001-4012.2004.08.005

2004-01-01

Abstract:Both the texture of as-deposited silver film and the same film annealed at 400℃ in vacuum atmosphere for 4 hours were investigated by XRD. The as-deposited silver film, as shown by quantitative analysis, has (111) and (100) texture component. After annealing at 400℃ for 4 hours, the (111) texture and (100) texture of the silver film attached to the silicon substrate strengthened greatly. The results were explained with the mechanism of grain growth driven by anisotropy of surface energy and strain energy.