Design and dispensing volume estimation of a single piezo-driven dispenser with a rigid–flexible combined transmission mechanism
Min Wu,Jun-Jie Zheng,Run-Mao Zhao,Jian-Neng Chen,Qi-Cheng Wang,Yi-Kun Wei,Shao-Fei Pan
DOI: https://doi.org/10.1007/s00542-024-05797-7
2024-11-02
Microsystem Technologies
Abstract:Piezo-driven dispensers are widely used in the microelectronic packaging field. However, the integrated structure must be replaced in whole when the flexible parts are fatigued, the preload structure is easy to loosen or cannot be adjusted, and the dispensing volume is difficult to estimate. A rigid–flexible combined mechanism with a unilateral preloading feature was introduced, and a droplet volume estimation method was proposed. First, a single piezo-driven dispenser was designed and analyzed, a static model of the displacement transmission mechanism was established, and the transmission ratio was designed. Second, based on the limiting method and the curtain area assumption, a linearized dispensing volume estimation model was proposed. Third, a fluid simulation model was established, and the localized high-pressure of the cavity was simulated to verify the theoretical model. Last, a dispenser prototype was manufactured and tested. The results show that the designed dispenser worked stably, with a diameter consistency of 4.22%. The relative error of the integral of localized high–pressure over time between the simulation and theory was 4.87%, and the droplet volume trend of the test is consistent with the theory under different control parameters, which has a relative average error of 5.3%, verifying the feasibility of the droplet volume estimation model. Furthermore, when the operating frequency reached 400 Hz, the minimum diameter and volume were 0.43 mm and 0.092 μl, respectively. This study has practical importance for improving the stability of the preload structure of a piezo-driven dispenser and reducing the replacement cost. The study also provides a certain theoretical basis for the dispenser to achieve drop-on-demand technologies.
engineering, electrical & electronic,materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied