Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements
Huang Li,Xiaoqiang Peng,Chaoliang Guan,Hao Hu
DOI: https://doi.org/10.3390/mi13071115
IF: 3.4
2022-07-16
Micromachines
Abstract:In this work, based on the diffraction principle of reflective blazed grating, the structure size of the convex spherical blazed grating unit is determined, the machining accuracy of the convex spherical blazed grating is formulated, the effects of tool nose radius and Poisson burr on the diffraction efficiency of the convex spherical blazed grating are analyzed, and the performances of cutting convex gratings with microcrystalline aluminum RSA6061 and RSA6061+ chemically plated NiP for two workpiece materials are compared. A convex spherical blazed grating with a radius of curvature R = 41.104 mm, substrate diameter 14 mm, grating density 53.97 line/mm, and blaze angle of roughly 3.8° is turned by a four-axis ultra-precision machining system by adjustment of the cutting tool, workpiece material, and cutting parameters, as well as modification of the layouts of the blazed grating on the convex sphere. The results of the testing of convex spherical blazed grating elements in both layouts show that the size error of the grating period is close for both layouts, the size error of grating height is smaller in the equal-along-arc layout, the blaze angle error in the equal-along-projection layout is only 0.74%, and the average roughness of the blazed surface is less than 5 nm to meet the processing quality requirements of the reflective convex spherical blazed grating. The greater the blaze angle accuracy of the blazed grating, the higher its diffraction efficiency, so the grating element with an equal-along-projection layout has a higher diffraction efficiency than the grating element with an equal-along-arc layout. RSA6061+ chemically plated NiP material is superior to RSA6061 material in Poisson burr height and blazed surface roughness, which is more suitable for Offner-type imaging spectrometers in the spectral range 0.95–2.5 μm (SWIR).
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied