Abstract:We present and demonstrate a MEMS-based tunable terahertz metamaterial (TTM) composed of inner triadius and outer electric split-ring resonator (eSRR) structures. With the aim to explore the electromagnetic responses of TTM device, different geometrical parameters are compared and discussed to optimize the suitable TTM design, including the length, radius, and height of TTM device. The height of triadius structure could be changed by using MEMS technique to perform active tunability. TTM shows the polarization-dependent and electromagnetic induced transparency (EIT) characteristics owing to the eSRR configuration. The electromagnetic responses of TTM exhibit tunable characteristics in resonance, polarization-dependent, and electromagnetically induced transparency (EIT). By properly tailoring the length and height of the inner triadius structure and the radius of the outer eSRR structure, the corresponding resonance tuning range reaches 0.32 THz. In addition to the above optical characteristics of TTM, we further investigate its potential application in a refraction index sensor. TTM is exposed on the surrounding ambient with different refraction indexes. The corresponding key sensing performances, such as figure of merit (FOM), sensitivity (S), and quality factor (Q-factor) values, are calculated and discussed, respectively. The calculated sensitivity of TTM is 0.379 THz/RIU, while the average values of Q-factor and FOM are 66.01 and 63.83, respectively. These characteristics indicate that the presented MEMS-based TTM device could be widely used in tunable filters, perfect absorbers, high-efficient environmental sensors, and optical switches applications for THz-wave optoelectronics.

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Guided Mode Resonance with Extremely High Q-Factors in Terahertz Metamaterials

Guided mode resonance in planar metamaterials consisting of two ring resonators with different sizes

Tunable quad-band transmission response, based on single-layer metamaterials.

Multi-Band Electromagnetically-Induced-Transparency Metamaterial Based on the Near-Field Coupling of Asymmetric Split-Ring and Cut-Wire Resonators in the GHz Regime

Guided Mode Resonance in Terahertz Compound Metamaterial Waveguides

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Analogue of electromagnetically induced transparency with high Q factor in Metal-dielectric metamaterials

Tunable electromagnetically induced transparency in coupled three-dimensional split-ring-resonator metamaterials

Electromagnetically Induced Transparency-Like Effect in Microring-Bragg Gratings Based Coupling Resonant System.

Dynamically Tunable Electromagnetically Induced Transparency in Graphene and Split-Ring Hybrid Metamaterial

Analogue of Electromagnetically Induced Transparency by Doubly Degenerate Modes in A U-Shaped Metamaterial

Switching and Extension of Transmission Response, Based on Bending Metamaterials

Multi-band and polarization-insensitive electromagnetically-induced transparency based on coupled-resonators in a metamaterial operating at GHz frequencies

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Multi-Band Analogue Electromagnetically Induced Transparency in DoubleTuned Metamaterials

Polarization-sensitive and active controllable electromagnetically induced transparency in U-shaped terahertz metamaterials

Polarization and incidence insensitive dielectric electromagnetically induced transparency metamaterial.