Wafer-level Fabrication of Nanocone Forests by Plasma Repolymerization Technique for Surface-Enhanced Raman Scattering Devices

Haiyang Mao,Chengjun Huang,Wengang Wu,Mei Xue,Yudong Yang,Jijun Xiong,Anjie Ming,Weibing Wang
DOI: https://doi.org/10.1016/j.apsusc.2016.11.092
IF: 6.7
2017-01-01
Applied Surface Science
Abstract:This work presents a novel type of surface-enhanced Raman scattering ( SERS) devices based on nanocone forests. The nanocone forests are fabricated by using a plasma repolymerization technique, which is a simple and parallel approach that has high reproducibility in wafer-level fabrication. The nanocone forest-based SERS devices exhibit an averaged enhancement factor at the order of 3 x 10(6), meanwhile, the relative standard deviation of Raman intensity over large areas is around 7%. These experimental results demonstrate great potential of the nanocone forest-based SERS devices in wide applications. (C) 2016 Elsevier B. V. All rights reserved.
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