A Dynamically Tunable Terahertz Metamaterial Absorber Based on an Electrostatic MEMS Actuator and Electrical Dipole Resonator Array

Fangrong Hu,Ningning Xu,Weiming Wang,Yue'e Wang,Wentao Zhang,Jiaguang Han,Weili Zhang
DOI: https://doi.org/10.1088/0960-1317/26/2/025006
2016-01-01
Journal of Micromechanics and Microengineering
Abstract:We experimentally demonstrate a dynamically tunable terahertz (THz) metamaterial absorber based on an electrostatic microelectromechanical systems (MEMS) actuator and electrical dipole resonator array. The absorption of the THz wave is mainly a result of the electrical dipole resonance, which shows a tunable performance on demand. By preforming the finite integral technique, we discovered that the central absorption frequency and the amplitude can be simultaneously tuned by the applied voltage U. Characterized by a white light interferometer and a THz time domain spectroscopy system, our THz absorber is measured to show a modulation of the central frequency and the amplitude to about 10% and 20%, respectively. The experimental results show good agreement with the simulation. This dynamically tunable absorber has potential applications on THz filters, modulators and controllers.
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