Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Chip-scale Integrated Quantum Technologies

Silicon Photonic Devices for Scalable Quantum Information Applications

Advances in Chip‐Scale Quantum Photonic Technologies

Chip-based Quantum Communications

Chip-scale nonlinear photonics for quantum light generation

Quantum Photonic Network on Chip

Integrated Quantum Information Science with Photons

Chip-based photon quantum state sources using nonlinear optics

Quantum Photonic Interconnect

Microwave Photonics on A Chip: Superconducting Circuits As Artificial Atoms for Quantum Information Processing

Photostable molecules on chip: integrated single photon sources for quantum technologies

VLSI Quantum Graph Photonics

On-Chip Single-Photon Sifter

Silicon-based Photonic Quantum Information Technologies

Theory and Design of Chip-Based Quantum Light Sources Using Planar Photonic Crystals

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon

Chip-based Photonic Graph States

Quantum Entanglement on Photonic Chips: a Review

Silicon photonics interfaced with microelectronics for integrated photonic quantum technologies: a new era in advanced quantum computers and quantum communications?

On chip high-dimensional entangled photon sources

Quantum Dot Photonic Devices and Applications