Research on high sensitivity remote high-speed detectors for laser heterodyne signals

Peng-cheng HU,Hong-xing YANG,Jian-ting MEI
DOI: https://doi.org/10.16136/j.joel.2014.05.004
2014-01-01
Abstract:According to the requirements of the multi-axis,high speed,ultra-precision heterodyne interferometer,a high bandwidth laser heterodyne signal detecting method based on remote detection is proposed in this paper.First,a remote fiber sensor is designed to reduce the thermal dissipation of the conventional receivers in multi-axis laser heterodyne interferometers.With the remote probe design,the light receiving module is separated from the detection circuits,which can completely eliminate the effect of the receiver heat dissipation.Second,an optical detector APD with temperature compensation for high voltage power supply is designed to solve the problem of difficult detecting of the weak light power in each axis of a multi-axis measurement system.Based on this design,high sensitivity and high stability photoelectric conversion can be achieved.According to the above theory analysis and key technology research,a high sensitivity and high stability remote laser heterodyne interference signal detector is integrated and arresponding experiments have been done in the laboratory environment.Experimental results verify that the new photoelectric detector can realize 38%coupling efficiency and above,0.52μW detection sensitivity, and 17.5MHz measurement response bandwidth.With the improvement in the above performance,the detector can meet the requirements of the high-speed multi-axis laser heterodyne measuring systems.
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