Fabrication and Vibration Test of Micro Piezoelectric Synthetic Jet with Side Nozzle

王树山,马炳和,邓进军,曲红冬

DOI: https://doi.org/10.3969/j.issn.1003-5451.2014.03.002

2014-01-01

Abstract:A fabrication process for micro piezoelectric synthetic jet actuator with side nozzle was developed for active flow control, and the piezoelectric vibrator performance is measured. The main microfabrication process included the orifice and cavity fabrication of silicon wafer by inductive coupled plasma etching (ICP) method, the bonding of Si and glass by anodic bonding method, and the patterning of PZT vibration film on Si substrate using a kind of solution. The micro piezoelectric synthetic jet was obtained after wire bonding and dicing. The test results showed that the center amplitude and vibration velocity of piezoelectric vibrator are 15.05μm and 472.2mm/s at the resonant frequency 5kHz. They have same variation and are both affected by the amplitude and frequency of drive voltage.