FABRICATION AND CHARACTERIZATION OF (K, Na) NbO3-BASED LEAD FREE PIEZOELECTRIC THIN FILM

Yuanhang LI,Feng CHEN,Guanyin GAO,Haoran XU,Wenbin WU
2015-01-01
Abstract:Single phase and epitaxial 0.95(Na0.49K0.49Li0.02)(Nb0.8Ta0.2)-0.05CaZrO3(LKNNT-CZ)piezoelectric thin films are successfully fabricated on La0.7Sr0.3MnO3 coated SrTiO3(001)substrates by pulsed laser deposition.The microstructures,surfaces,ferroelectric and dielectric properties are intensively investigated with high-resolution X-ray diffraction(XRD),X-ray photoelectron spectra(XPS),P-E loops and dielectric constant measurements.It is found the epitaxial LKNNT-CZ films show well saturated ferroelectric hysteresises with the drive voltage ranging from 4Vto 10 V.The film contains a typical dielectric constant of 1185 at 1kHz,a remnant polarization(Pr)of12.4μC/cm2 and a coercive field(Ec)of 102.3kV/cm under 10 V.
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