Application of Soft Computing in Modeling of CVD/CVI Process

顾正彬,李贺军,李克智,李爱军
DOI: https://doi.org/10.3321/j.issn:1005-023x.2003.05.004
2003-01-01
Abstract:Soft computing is a collection of methodologies that aim to exploit the tolerance for imprecision and uncertainty to achieve tractability,robustness,and low solution cost. Its principal constituents are fuzzy logic, neural network and evolutional computing. The applications of soft computing in the modeling of CVD/CVI process are summarized in this paper.
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