Research on Picosecond Laser Drilling of Inkjet Printhead Nozzle

褚祥诚,仲作金,张红军,张淑兰,周梅,崔宏超,文军,钟敏霖

DOI: https://doi.org/10.3969/j.issn.1006-8236.2014.12.005

2014-01-01

Abstract:The nozzle diameter of the inkjet printhead is typically several tens of microns, and the material is generally organic thin film,stainless steel sheet or the like. For the disadvantage of organic thin film as nozzle plate material, zirconium oxide ceramics is used instead to improve wearability and corrosion resistance. Picosecond laser drilling method can be applied to fabricate orifices with a diameter of several tens of microns in a variety of materials including polyimide(50μm), zirconia ceramics(120μm) and thin copper sheet(70μm). By controlling various parameters, an array of nozzles with pore size of 20μm and interval of 140μm can be prepared. Comparison of different parameters nozzle size and micro-morphology indicates that higher power and lower single point residence time help to get a round hole, and to reduce recast layer.