Randomly Controlled Metamaterial Modulator for Dynamic Tuning of Optical Property

Yifei Mao,Wengang Wu,Jun Xu
DOI: https://doi.org/10.1109/memsys.2016.7421702
2016-01-01
Abstract:We design and fabricate a randomly controlled metamaterial modulator (RCMM) which can dynamically tune reflection in infrared region. The RCMM is a metamaterial-cell array, and each cell is comprised of a raw of S-shaped cantilevers called meta-molecules. The devices were produced by using focused-ion-beam etching and deposition on suspended metal-dielectric-metal membranes. Word/bit-line method is introduced to precisely control the thermoelectricity-caused bending of every individual meta-cell in the RCMM. A 2×2 RCMM exhibits 16 different states, which represents different operation conditions of the device, resulting in the shift of the reflection spectrum. The end portion of a meta-cell with 20 μm-long meta-molecules can be raised up to 2μm, and the corresponding optical reflection of the device will be modulated by up to 40%.
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