Abstract:Microfluidic lab-on-a-chip devices are usually fabricated using replica molding, with poly(dimethylsiloxane) (PDMS) casting on a mold. Most common techniques used to fabricate microfluidic molds, such as photolithography and soft lithography, require costly facilities such as a cleanroom, and complicated steps, especially for the fabrication of three-dimensional (3D) features. For example, an often-desired 3D microchannel feature consists of intersecting channels with depth variations. This type of 3D flow focusing geometry has applications in flow cytometry and droplet generation. Various manufacturing techniques have recently been developed for the rapid fabrication of such 3D microfluidic features. In this paper, we describe a new method of mold fabrication that utilizes water jet cutting technology to fabricate free-standing structures on mild steel sheets to make a mold for PDMS casting. As a proof-of-concept, we use this fabrication technique to make a PDMS chip that has a 3D flow focusing junction, an inlet for the sample fluid, two inlets for the sheath fluid, and an outlet. The flow focusing junction is patterned into the PDMS slab with an abrupt, nearly stepwise change to the depth of the microchannel junction. We use confocal microscopy to visualize the 3D flow focusing of a sample flow using this geometry, and we also use the same geometry to generate water-in-oil droplets. This alternative approach to create microfluidic molds is versatile and may find utility in reducing the cost and complexity involved in fabricating 3D features in microfluidic devices.

Low-cost Rapid Prototyping of Glass Microfluidic Devices Using a Micromilling Technique

A Rapid and Low-Cost Procedure for Fabrication of Glass Microfluidic Devices

An Alternative Micro-Milling Fabrication Process for Rapid and Low-Cost Microfluidics

Rapid prototyping of microfluidic chip with burr-free PMMA microchannel fabricated by revolving tip-based micro-cutting

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Micro Etching Method Inside Microchannels

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Fabrication Of Microfluidic Chips By An Ultrasonic Micromachining With Wet-Etch Smoothing Method On Glass Substrates

Microchannel Fabrication on Glass Materials for Microfluidic Devices

Evaluating Laser‐Based Microfabrication in Microfluidics: An Experimental and Computational Trial

A novel abrasive water jet machining technique for rapid fabrication of three-dimensional microfluidic components

Rapid method for design and fabrication of passive micromixers in microfluidic devices using a direct-printing process.

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Rapid Prototyping of Thermoplastic Microfluidic Devices

Route to one-step microstructure mold fabrication for PDMS microfluidic chip

Glass etching to bridge micro- and nanofluidics.

Fabrication Of Microfluidic Devices In Silica Glass By Water-Assisted Ablation With Femtosecond Laser Pulses

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.