Abstract:Manufacturing of semiconductor chips involves hundreds of process steps. For high-throughput semiconductor manufacturers, it is not feasible to get all the quality measurements of wafers at each step because of expensive costs. Based on the limited measurements of sampled wafers, virtual metrology (VM) allows predicting the relevant quality variables without increasing the number of physical measurements. Traditional data-driven VM methods are constructed using a predefined model along with feature extractions in data pre-processing. Often the identified VM model is not reliable if the constructed model and the extracted features are improper. In this paper, the convolutional neural network (CNN) based Gaussian process regression (GPR) VM mode (CNN-GPR) calibrated by maximization of the Bayesian posterior density distribution is systematically developed. CNN is used to extract information from massive wafer data through layers of the cascade-connected convolving filters. With the extracted features, the GPR model associates the stochastic nature of the operating steps with the quality variables to obtain the predicted means as well as the quantitated uncertainty levels. Unlike the traditional VM models where the extracted features and the prediction models are generated separately, the CNN-GPR model is sensitive to the variations of the quality variables and the features are determined simultaneously through the covariance matrices with information from both of the process and the quality variables. The proposed CNN-GPR model performs better as it represents the complex process of the whole set of measured variables. Through the studies on a real semiconductor process, the effectiveness of the proposed algorithm is demonstrated and compared against the regular regression algorithms.

Development of Self-Learning Kernel Regression Models for Virtual Sensors on Nonlinear Processes

Soft Sensors of Nonlinear Industrial Processes Based on Self-Learning Kernel Regression Model

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Adaptive Virtual Sensors Using SNPER for the Localized Construction and Elastic Net Regularization in Nonlinear Processes

Virtual Sensors of Nonlinear Industrial Processes Based on Neighborhood Preserving Regression Model

Generalized Semisupervised Self-Optimizing Kernel Model for Quality-Related Industrial Process Monitoring.

Adaptive Local Kernel-Based Learning for Soft Sensor Modeling of Nonlinear Processes

Locally Weighted Kernel Principal Component Regression Model for Soft Sensing of Nonlinear Time-Variant Processes

Nonlinear Process Monitoring Using Improved Kernel Principal Component Analysis

Learning a Data-Dependent Kernel Function for KPCA-based Nonlinear Process Monitoring

Development of Convolutional Neural Network Based Gaussian Process Regression to Construct a Novel Probabilistic Virtual Metrology in Multi-Stage Semiconductor Processes

Using Svm To Model And Control Nonlinear Dynamical Systems

Nonlinear Dynamic Process Monitoring Based on Kernel Partial Least Squares

Industrial Virtual Sensing for Big Process Data Based on Parallelized Nonlinear Variational Bayesian Factor Regression

Nonlinear Variational Bayesian Student’s-t Mixture Regression and Inferential Sensor Application with Semisupervised Data

Just-in-time kernel learning with adaptive parameter selection for soft sensor modeling of batch processes

Deep Learning of Process Data with Supervised Variational Auto-encoder for Soft Sensor

Laplacian Regularization of Linear Regression Model for Semi-Supervised Industrial Soft Sensor Development

Nonlinear Soft Sensor Development Based on Relevance Vector Machine

Systematic Development of a New Variational Autoencoder Model Based on Uncertain Data for Monitoring Nonlinear Processes

Adaptive local weighted kernel-based regression for online modeling of batch processes