Sapphire-supported nanopores for low-noise DNA sensing
Pengkun Xia,Jiawei Zuo,Pravin Paudel,Shinhyuk Choi,Xiahui Chen,Md Ashiqur Rahman Laskar,Jing Bai,Weisi Song,JongOne Im,Chao Wang
DOI: https://doi.org/10.1016/j.bios.2020.112829
IF: 12.545
2021-02-01
Biosensors and Bioelectronics
Abstract:<p>Solid-state nanopores have broad applications from single-molecule biosensing to diagnostics and sequencing. The high capacitive noise from conventionally used conductive silicon substrates, however, has seriously limited both their sensing accuracy and recording speed. A new approach is proposed here for forming nanopore membranes on insulating sapphire wafers to promote low-noise nanopore sensing. Anisotropic wet etching of sapphire through micro-patterned triangular masks is used to demonstrate the feasibility of scalable formation of small (<25 μm) membranes with a size deviation of less than 7 μm over two 2-inch wafers. For validation, a sapphire-supported (SaS) nanopore chip with a 100 times larger membrane area than conventional nanopores was tested, which showed 130 times smaller capacitance (10 pF) and 2.6 times smaller root-mean-square (<span>RMS</span>) noise current (18–21 pA over 100 kHz bandwidth, with 50–150 mV bias) when compared to a silicon-supported (SiS) nanopore (∼1.3 nF, and 46–51 pA <span>RMS</span> noise). Tested with 1k bp double-stranded DNA, the SaS nanopore enabled sensing at microsecond speed with a signal-to-noise ratio of 21, compared to 11 from a SiS nanopore. This SaS nanopore presents a manufacturable nanoelectronic platform feasible for high-speed and low-noise sensing of a variety of biomolecules.</p>
biotechnology & applied microbiology,biophysics,chemistry, analytical,electrochemistry,nanoscience & nanotechnology