Quadrature Phase Detection Based on a Laser Self-Mixing Interferometer with a Wedge for Displacement Measurement
Dongyu Li,Qinghua Li,Xiao Jin,Bing Xu,Deng Wang,Xuping Liu,Tingting Zhang,Zhenghe Zhang,Minglang Huang,Xiaohui Hu,Chengwei Li,Zhen Huang
DOI: https://doi.org/10.1016/j.measurement.2022.111888
2022-01-01
SSRN Electronic Journal
Abstract:We report a novel and simple method to generate a pair of self-mixing signals with quadrature phase difference in He-Ne laser by introducing a wedge into the external cavity. A wedge phase-shift laser self-mixing effect theory is developed to explain the phase-shift phenomenon, and the relationship between the phase difference and the distance from the center of the iris diaphragm to the center of the spot is given. Then a simple and effective wedge-quadrature laser self-mixing interferometer is established for displacement measurement by the quadrature phase detection method. Experimental results show that the max error is 182 nm for a target displacement of 20 mu m. This structure provides a useful exploration for phase-shift signal generation and simplifies the self-mixing signal demodulation process with only a single four-quadrant inverse tangent operation, which has potential application in real-time displacement measurement.