Conductively Coupled Flexible Silicon Electronic Systems for Chronic Neural Electrophysiology.

Jinghua Li,Enming Song,Chia-Han Chiang,Ki Jun Yu,Jahyun Koo,Haina Du,Yishan Zhong,Mackenna Hill,Charles Wang,Jize Zhang,Yisong Chen,Limei Tian,Yiding Zhong,Guanhua Fang,Jonathan Viventi,John A Rogers
DOI: https://doi.org/10.1073/pnas.1813187115
2018-01-01
Abstract:Significance A critical challenge for flexible biomedical implants is in the development of materials and structures that enable intimate coupling to biotissues with long-term stability. The results presented here address this problem through a materials and integration strategy that combines highly doped silicon nanomembranes chemically bonded to thin films of thermal silicon dioxide in a construct that simultaneously serves as a biofluid barrier and a conductively coupled biointerface. Use of this approach with various flexible electronic systems, including passive and active electrodes for electrophysiological sensing and electrical stimulation, illustrate capabilities in high-fidelity operation. Systematic accelerated lifetime studies in artificial biofluids highlight the stability of these systems for chronic operation, without electrical leakage or other forms of degradation.
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