Abstract:Growing layer‐tunable and transfer‐free graphene films directly on device‐compatible substrates using ion implantation, fabricated photodetectors, field‐effect transistors, and heating devices. Direct synthesis of layer‐tunable and transfer‐free graphene on technologically important substrates is highly valued for various electronics and device applications. State of the art in the field is currently a two‐step process: a high‐quality graphene layer synthesis on metal substrate through chemical vapor deposition (CVD) followed by delicate layer transfer onto device‐relevant substrates. Here, we report a novel synthesis approach combining ion implantation for a precise graphene layer control and dual‐metal smart Janus substrate for a diffusion‐limiting graphene formation to directly synthesize large area, high quality, and layer‐tunable graphene films on arbitrary substrates without the post‐synthesis layer transfer process. Carbon (C) ion implantation was performed on Cu–Ni film deposited on a variety of device‐relevant substrates. A well‐controlled number of layers of graphene, primarily monolayer and bilayer, is precisely controlled by the equivalent fluence of the implanted C‐atoms (1 monolayer ~4 × 1015 C‐atoms/cm2). Upon thermal annealing to promote Cu‐Ni alloying, the pre‐implanted C‐atoms in the Ni layer are pushed toward the Ni/substrate interface by the top Cu layer due to the poor C‐solubility in Cu. As a result, the expelled C‐atoms precipitate into a graphene structure at the interface facilitated by the Cu‐like alloy catalysis. After removing the alloyed Cu‐like surface layer, the layer‐tunable graphene on the desired substrate is directly realized. The layer‐selectivity, high quality, and uniformity of the graphene films are not only confirmed with detailed characterizations using a suite of surface analysis techniques but more importantly are successfully demonstrated by the excellent properties and performance of several devices directly fabricated from these graphene films. Molecular dynamics (MD) simulations using the reactive force field (ReaxFF) were performed to elucidate the graphene formation mechanisms in this novel synthesis approach. With the wide use of ion implantation technology in the microelectronics industry, this novel graphene synthesis approach with precise layer‐tunability and transfer‐free processing has the promise to advance efficient graphene‐device manufacturing and expedite their versatile applications in many fields.

Synthesis of Ultrathin Graphdiyne Film Using a Surface Template.

Template Synthesis of an Ultrathin Β-Graphdiyne-like Film Using the Eglinton Coupling Reaction.

Ultrathin Graphdiyne Film on Graphene Through Solution-Phase Van Der Waals Epitaxy

Advanced Progress in the Synthesis of Graphdiyne

Exploring Approaches for the Synthesis of Few‐Layered Graphdiyne

Space‐Confined Synthesis of Monolayer Graphdiyne in MXene Interlayer

Catalyst‐Free Synthesis of Few‐Layer Graphdiyne Using a Microwave‐Induced Temperature Gradient at a Solid/Liquid Interface

Structural and electronic properties of bilayer and trilayer graphdiyne.

Crystalline monolayer graphdiyne synthesized in the MXene interlayer space

Three Dimensional Graphdiyne Polymers with Tunable Band Gaps

Synthesis Methods of Graphdiyne and Graphdiyne Based Materials

Structural, Electronic, and Optical Properties of Bulk Graphdiyne

Graphdiyne: synthesis, properties, and applications

New Synthetic Methods towards Graphdiyne

Artificial Carbon Graphdiyne: Status and Challenges in Nonlinear Photonic and Optoelectronic Applications

Synthesis of Graphdiyne Nanowalls Using Acetylenic Coupling Reaction.

Graphether: A Two-Dimensional Oxocarbon as a Direct Wide-Gap Semiconductor with High Mechanical and Electrical Performances

Synthesis and Photoluminescence of Graphdiyne

Direct Synthesis of Layer‐Tunable and Transfer‐Free Graphene on Device‐Compatible Substrates Using Ion Implantation Toward Versatile Applications

Few-Layered Graphyne Growth by an On-Surface Coupling Reaction via Alkynyl Vapour Deposition

Rapid synthesis of few-layer graphdiyne using radio frequency heating and its application for dendrite-free zinc anodes