In-fiber Illumination-Detection-synchronized Confocal Microscopy for High-Precision Fast Axial Scanning
Yuhang Wang,Xinwei Wang,Huijie Hao,Xumin Ding,Peng Xie,Kang Gu,Jianwei Cui,Cuong Dang,Jian Liu,Guangwei Hu
DOI: https://doi.org/10.1016/j.measurement.2024.114998
IF: 5.6
2024-01-01
Measurement
Abstract:Confocal microscopy remains a major workhorse in the 3D surface topography measurement owing to its reliability and compatibility for workpieces with various reflectance, which, however, suffers from slow scanning speed and limited axial resolution. Commercial confocal microscopy primarily relies on the axial movement of a sample or objective lens to create a series of 2D image stacks, and then reconstruct 3D map. Nevertheless, most samples and objective lens are too bulky to scan rapidly, let alone that multiple scans are required to increase the signal-to-noise ratio (SNR). To address this issue, an original approach named illumination -detectionsynchronized confocal microscopy was developed, which enabled high -precision fast axial scanning via a compact fiber -multiplexed port with the high-speed synchronous motion of point source and point detection. The approach can effectively improve the peak localization precision while not requiring a high -precision motion stage. Theoretically, via controlling the magnification of the optical system M > 1, the total peak localization precision of axial light intensity response curve can be improved by M-3 times. Experiments show that the singlepoint repeat measurement precision by this approach is improved by 4 times, and the profile measurement precision is enhanced by 2.3 times. Moreover, this approach can effectively avoid collisions between the sample and objective lens, and has the potential to design a low-cost single -point confocal sensor or confocal profilometer.