Abstract:Mechanical systems facilitate the development of a hybrid quantum technology comprising electrical, optical, atomic and acoustic degrees of freedom1, and entanglement is essential to realize quantum-enabled devices. Continuous-variable entangled fields-known as Einstein-Podolsky-Rosen (EPR) states-are spatially separated two-mode squeezed states that can be used for quantum teleportation and quantum communication2. In the optical domain, EPR states are typically generated using nondegenerate optical amplifiers3, and at microwave frequencies Josephson circuits can serve as a nonlinear medium4-6. An outstanding goal is to deterministically generate and distribute entangled states with a mechanical oscillator, which requires a carefully arranged balance between excitation, cooling and dissipation in an ultralow noise environment. Here we observe stationary emission of path-entangled microwave radiation from a parametrically driven 30-micrometre-long silicon nanostring oscillator, squeezing the joint field operators of two thermal modes by 3.40 decibels below the vacuum level. The motion of this micromechanical system correlates up to 50 photons per second per hertz, giving rise to a quantum discord that is robust with respect to microwave noise7. Such generalized quantum correlations of separable states are important for quantum-enhanced detection8 and provide direct evidence of the non-classical nature of the mechanical oscillator without directly measuring its state9. This noninvasive measurement scheme allows to infer information about otherwise inaccessible objects, with potential implications for sensing, open-system dynamics and fundamental tests of quantum gravity. In the future, similar on-chip devices could be used to entangle subsystems on very different energy scales, such as microwave and optical photons.

Emission of Non-Classical Radiation by Inelastic Cooper Pair Tunneling

Photon Cross-Correlations Emitted By A Josephson Junction In Two Microwave Cavities

An Analog of Optical Rabi Oscillation in Superconducting Josephson Circuits

Spectral signature of high-order photon processes mediated by Cooper-pair pairing

High-Impedance Microwave Resonators with Two-Photon Nonlinear Effects

Quantum Information Processing with Superconducting Qubits in A Microwave Field

Resonant squeezed light from photonic Cooper pairs

Microwave-induced conductance replicas in hybrid Josephson junctions without Floquet-Andreev states

Nonclassical Photon Pairs Generated from a Room-Temperature Atomic Ensemble

Resonant escape in Josephson tunnel junctions under millimeter-wave irradiation

Quantum electrodynamics and photon-assisted tunnelling in long Josephson junctions

Stationary entangled radiation from micromechanical motion

Deterministic Entanglement of Photons in Two Superconducting Microwave Resonators

Quantum microwaves: stabilizing squeezed light by phase locking

Two-tone spectroscopy of high-frequency quantum circuits with a Josephson emitter

Non-classical microwave–optical photon pair generation with a chip-scale transducer

Nonclassical correlated deterministic single-photon pairs for a trapped atom in bimodal cavities

Broadband squeezed microwaves and amplification with a Josephson travelling-wave parametric amplifier

Wave-particle correlations in multiphoton resonances of coherent light-matter interaction

Non-classical correlations between photons and phonons of center-of-mass motion of a mechanical oscillator

Observation of thermal microwave photons with a Josephson junction detector