The Fabrication and Visible–near-Infrared Optical Modulation of Vanadium Dioxide/silicon Dioxide Composite Photonic Crystal Structure

Jiran Liang,Peng Li,Xiaolong Song,Liwei Zhou
DOI: https://doi.org/10.1007/s00339-017-1420-5
2017-01-01
Applied Physics A
Abstract:We demonstrated a visible and near-infrared light tunable photonic nanostructure, which is composed of vanadium dioxide (VO 2 ) thin film and silicon dioxide (SiO 2 ) ordered nanosphere arrays. The vanadium films were sputtered on two-dimensional (2D) SiO 2 sphere arrays. VO 2 thin films were prepared by rapid thermal annealing (RTA) method with different oxygen flow rates. The close-packed VO 2 shell formed a continuous surface, the composition of VO 2 films in the structure changed when the oxygen flow rates increased. The 2D VO 2 /SiO 2 composite photonic crystal structure exhibited transmittance trough tunability and near-infrared (NIR) transmittance modulation. When the oxygen flow rate increased from 3 slpm to 4 slpm, the largest transmittance trough can be regulated from 904 to 929 nm at low temperature, the transmittance troughs also appear blue shift when the VO 2 phase changes from insulator to metal. The composite nanostructure based on VO 2 films showed visible transmittance tunability, which would provide insights into the glass color changing in smart windows.
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