Abstract:Surface-structured engineering of hyperdoped silicon can effectively facilitate the absorption of sub-bandgap photons in pristine single-crystal silicon (sc-Si). Here, we conducted different annealing approaches of ordinary thermal annealing (OTA) and nanosecond laser annealing (NLA) on modification of titanium-hyperdoped silicon (Si:Ti) surface structure, to achieve efficient near-infrared detection. It is presented that both OTA and NLA processes can improve the crystallinity of Si:Ti samples. In detail, atomic-resolved STEM characterization illustrates that NLA treatment will further eliminate the amorphous phase on Si:Ti surface to varying degrees. While one-dimensional periodic stacking fault structure of 9R-Si phase is formed at the surface of sc-Si and embedded in the Si matrix during the OTA process, which reveals the seamless interface of 9R-Si/sc-Si along with [11¯0] direction. Due to the high sub-bandgap light absorption and good crystal structure, the Si:Ti photodetector after NLA treatment with an energy density of 2.6 J cm-2exhibited the highest responsivity, reaching 151 mA W-1at 1550 nm even at a low operating voltage of 1 V. We assume the performance enhancement of NLA processed Si:Ti photodetectors can be attributed to two aspects, the one is NLA can reduce the recombination of photo-generated charge carriers in amorphous surface layer by improving crystallization, and the other is that NLA process can weaken the diffusion of titanium impurities due to the extremely rapid heating and cooling rates. This study presents prospects towards surface-structured silicon in infrared light detection.

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Self-adaptive Passive Temperature Management for Silicon Chips Based on Near-Field Thermal Radiation

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Temperature-dependent Raman Scattering of Silicon Nanowires.

Nanoscale radiation heat transfer for silicon at different doping levels

Nano-Structured Silicon: Fabrication, Optical Property, Defect States and Device Application

Nanosecond laser annealing processed surface-structured hyperdoped silicon for efficient near-infrared detection

Low Temperature Fabrication of Nanostructured Titanium Oxide Thin Films for Uncooled Ir Detectors

A Silicon Nanowire Heater and Thermometer

A SiGe/Si Nanostructure with Graphene Absorbent for Long Wavelength Infrared Detection

Nanoengineering Porous Silica for Thermal Management

Thermal Behavior of Amorphous Silicon Thin Film Transistor and Its Application to Micromachined Uncooled Infrared Sensors

Thermoelectric Performance of Silicon Nanowires

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Study on Fabrication and Thermal Analysis of Porous Silicon Nanoenergetic Materials

Sub-wavelength Temperature Probing in Near-Field Laser Heating by Particles.

Thermal conductivity reduction in rough silicon nanomembranes

Near-Infrared Absorptance Enhancement and Device Application of Nanostructured Black Silicon Fabricated by Metal-Assist Chemical Etching

Phase Transformation of Monocrystalline Silicon by Nanoindentation – Effect of Processing Temperature

Characterization of a Novel Microhotplate for Application in a Silicon-Based Nanofilm Gas Sensor

Raman Investigation of Silicon Nanocrystals: Quantum Confinement and Laser-Induced Thermal Effects