First Principles Calculations Study of Crystallographic Orientation Effects on SiC/Ti and SiC/Cr Interfaces

Lei Li,Weichao Jin,Huisheng Yang,Kewei Gao,Pengwen Guo,Xiaolu Pang,Alex A. Volinsky
DOI: https://doi.org/10.1016/j.microrel.2018.02.019
IF: 1.6
2018-01-01
Microelectronics Reliability
Abstract:First principles calculations of the SiC/Ti and SiC/Cr interfaces have been conducted based on the density functional theory, and adhesion properties along with the electronic structure were obtained. The crystallographic orientation dependence of the adhesion at the SiC/Ti and SiC/Cr interfaces has been investigated. The work of separation strongly depends on the crystallographic orientation with the SiC(1120)/Cr(001) interface having the highest value of W-sep = 4.71 J/m(2). By analyzing the electronic structures, it was found that the charge transfer between C and Cr is larger, leading to stronger chemical bonds.
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