Positive Velocity Feedback Control Of Flexure-Based Actuator For Vibration Suppression

Zhikun Cao,Chi Zhang,Qiang Liu,Hongyuan Lian,Guilin Yang,Si-Lu Chen
DOI: https://doi.org/10.1109/ICCIS.2017.8274803
2017-01-01
Abstract:Nanopositioning Stages based on flexure supporting mechanism are commonly used in precision manufacturing system with the advantages of non-friction and high accuracy. But there is always a major challenge to restrain the vibrations result from flexible supporting structure. This paper presents a novel control strategy based on positive velocity feedback (PVF) designed for flexure-based actuator, which is driven by voice coil motor. A PVF controller is designed to reduce resonance peak by using the similar ideal with positive position feedback[1]. Meanwhile, more advantages can be obtained with the employment of proportional-integral (PI) controller in position loop. The experiment results validate that the PVF control strategy presented in this paper can restrain vibration in nanopositioning stages effectively, and reduce resonance peak in velocity loop by 2dB, and increase the bandwidth by more than 40Hz.
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