Reconstruction of atomic force microscopy image using compressed sensing.

Guoqiang Han,Bo Lin,Yuling Lin
DOI: https://doi.org/10.1016/j.micron.2017.11.003
IF: 2.381
2018-01-01
Micron
Abstract:•The CS theory is introduced to solve the AFM imaging time-consuming and redundancy problem.•The obtained reconstructed images have different resolution and quality, depending on the surface morphology of the sample and sampling rates.•OMP reconstruction method allows less interaction between the sample and the probe tip, keeps the tip under good conditions and improves AFM measurement speed.•Both 2D and 3D AFM images of the PAA film, the TGG1 grating and TGZ3 grating were used to estimate reconstruction results of AFM images.
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