Abstract:In precision motion control, well-designed feedforward control can effectively compensate the reference-induced tracking error. To achieve excellent tracking performance such as nanometer accuracy regardless of reference variations, an integrated model-data-based zero-phase error tracking feedforward control (ZPETFC) strategy is synthesized for precision motion systems with complex and nonminimum phase (NMP) dynamics. The feedforward controller comprises a conventional ZPETFC controller and a gain compensation filter structured with symmetric finite impulse response (FIR) filter. Especially, the conventional ZPETFC is predesigned based on the plant model, and consequently, the feedforward controller is parameterized by the gain compensation filter coefficients, which results in excellent capacity for approximating the inverse behavior of the complex and NMP dynamics. In order to compensate the modeling error in the conventional ZPETFC design and improve the tracking performance, a data-based instrumental-variable method with impulse response experiment is developed to obtain the optimal parameter vector under the existence of noise and disturbances. Furthermore, the ridge estimate method using singular value decomposition is employed to guarantee a fast convergent iteration in the case of ill-conditioned Hessian matrix. The proposed ZPETFC strategy enables a convex optimization procedure with the inherent stability in the iterative tuning process, and is finally implemented on a developed ultraprecision wafer stage. Comparative experimental results demonstrate that the strategy is insensitive to reference variations in comparison with iterative learning control, and outperforms preexisting model-based ZPETFC and data-based FIR feedforward control.

Pre-Actuation and Optimal State Transition Based Precise Tracking for Maximum Phase System

Pre-Action And Stable Inversion Based Precise Tracking For Non-Minimum Phase System

Precise Tracking for Continuous‐Time Non‐Minimum Phase Systems

Precise Tracking of Periodic Trajectories for Periodic Systems.

Stable Inversion Based Precise Tracking for Periodic Systems

Robust Trajectory Tracking Control of Underactuated Unmanned Surface Vehicles with Exponential Stability: Theory and Experimental Validation.

Output Tracking Combing Output Redefinition and Non-Causal Stable Inversion for Non-Minimum Systems

Preview-Based Output Tracking of Nonminimum-Phase Linear Systems Via Trajectory Decomposition:Nanomanipulation Example

New Approach of Tracking Control for a Class of Non-Minimum Phase Linear Systems

Optimal Bounded Inversion for Nonminimum Phase Nonhyperbolic Systems.

Fast and Accurate Tracking Control of Robotic Manipulators Subject to State Constraints and Input Saturation by Effectively Integrating Planning Strategies

Quantitative Analysis on Tracking Error Under Different Control Architectures and Feedforward Methods

Output Tracking with Preview for Nonminimum-Phase Linear Systems Based on B-Splines Decomposition

Adaptive Output-Feedback Control with Prescribed Performance for Trajectory Tracking of Underactuated Surface Vessels.

Output Tracking for Nonlinear Non-Minimum Phase Systems and Application to PVTOL Aircraft

Predictive control algorithm for nonminimum phase processes

Dynamical Trajectory Tracking Control in Quantum Systems

An Inversion-Based Learning Approach for Improving Impromptu Trajectory Tracking of Robots With Non-Minimum Phase Dynamics

Tracking control of nano manipulating systems: A parallel phase-optimal notch filter approach

An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy with Application to an Ultraprecision Wafer Stage.