Abstract:Dynamic and real-time monitoring of the motion state of soft actuators is of great significance for optimizing their performance. However, present noncontact measurement approaches based on diffractive groove arrays fabricated by imprinting have some limitation, e.g., the grooves should be processed before the solidification of soft materials or the depth and period of grooves cannot be flexibly adjusted. Here, a flexible and high-efficiency fabrication approach carbon-assisted laser interference lithography (CLIL) for periodical groove structures with structural color is proposed. This technique is to irradiate the interference laser on the PDMS surface coated by a carbon layer, which is used for enhanced laser absorption. The processing parameters are systematically studied and optimized to achieve a bright structural color. Benefiting from the advantages of CLIL, the structural color can be processed on a solidified transparent surface with controllable characteristics such as groove period and depth. Lastly, the motion of an electric-driven actuator can be real-time quantified by calibrating the relationship between the observation angle and the observed structural color.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c14019?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c14019</a>.Figures of surface topography, height curves, comparison between the processing area and the unprocessed area, experimental setup and parameters settings, and curve of the relationship between actuator bending angle and time (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c14019/suppl_file/am0c14019_si_001.pdf">PDF</a>)Movie of deformation of the soft actuator (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c14019/suppl_file/am0c14019_si_002.mp4">MP4</a>)Movie of change of color during the entire deformation of the actuator (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c14019/suppl_file/am0c14019_si_003.mp4">MP4</a>)This article has not yet been cited by other publications.

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