Abstract:Laser thermal adjustment as an application of laser forming in micro systems attracts much attention. Previous work on laser thermal adjustment of the two-bridge actuator shows that the deformations are always limited. In this paper, an actuator with three cut-outs is designed to enlarge the deformation range. A simple deformation formula is also established for such actuator based on the deformation behavior of two-bridge actuators. Four cases of the location relation between the target position and the calculated set point are considered in planning the process parameters to reach the designed target position. The planning process is validated by the numerical simulation and experiments.

The Process Planning in Laser Thermal Adjustment of Three Cut-Outs Actuators